TEL Tokyo Electron 300mm Wafer PRA Process Block Robot Lithius No Arms Surplus
Model No: PRA X AXIS ASSY
Process Block Robotics Arm
Removed from a TEL Tokyo Electron 300mm Clean Track Lithius System
Sold As-Is
Made in Japan
Parts List (approximation, parts may vary or not be included or installed)
Assembly Part No: 5085-407036-19 X AXIS ASSY
5010-101146-12 BASE,(X)UPPER 1
5010-101147-13 BASE(X),LOWER 1
5004-400017-12 ARM(X1-1) (509510045511 1
5010-305344-11 SUPPORT(X1-1) 1
5004-400018-11 ARM(X2-1) (509510045511 1
5010-306532-11 ARM(X2-2) 1
5010-305345-12 SUPPORT(X2-1) 1
5004-400019-11 ARM(X3-1) (509510045511 1
5010-306533-11 ARM(X3-2) 1
5010-305346-11 SUPPORT(X3-1) 1
5004-400015-11 CLAMP,BELT (509510045411 6
5010-401565-12 PLATE 5
5010-404925-11 STOPPER(X-1) 3
5010-404926-11 STOPPER(X-2) 6
5010-305873-11 SUPPORT(X-2) 1
5010-305987-11 SUPPORT(X2-2) 1
5010-306512-12 STAY,SUPPORT 1
5010-405028-11 COVER,CABLE 1
5010-404472-11 COVER,SENSOR 1
5010-405427-11 PILLER(1) 2
5010-405428-11 PILLER(2) 4
5010-307086-12 PLATE(1),SIDE 1
5010-306535-12 PLATE(2),SIDE 1
5010-306536-12 PLATE(3),SIDE 1
5010-404927-11 BLOCK,AJUST 2
5010-405430-12 SHUTTER(X) 3
5010-405429-12 BRACKET,SUPPORT 1
5010-408761-11 SHUTTER(TH) 1
5010-402407-11 STOPPER(TH) 1
5010-405431-12 BRACKET,CABLE 1
5010-402408-12 BRACKET 2
5010-405432-12 BRACKET(1),MOUNT 1
5010-307587-12 BRACKET(2),MOUNT 1
5018-000001-13 LM GUIDE SHS15V1UUC1FEM+545LF 3
023-003018-1 BELT,TIMING 1500-3GT-15 OPEN 3
023-003019-1 BELT,TIMING 297-3GT-9 3
026-006380-1 SPACER DXMK10-8-5-9 3
021-000739-1 PIN,PRL 4*10 SMALL M6 A-TYPE SUS303 23
044-000044-1 SUPPORT,PCB EM-3 2
044-001720-1 SUPPORT,PCB 3SQS-10 4
020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 27
020-000009-1 CAP SCREW M3*10 SUS304 2
020-000824-1 CAP SCREW M3*10 SUS304 W/SPR & FLAT WASHER 8
020-001089-1 CAP SCREW M3*14 SUS304 8
020-000020-1 CAP SCREW M3*20 SUS304 22
020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 19
020-001093-1 CAP SCREW M4*14 SUS304 45
020-001091-1 CAP SCREW M4*16 SUS304 22
020-000042-1 CAP SCREW M4*20 SUS304 4
020-000737-1 CAP SCREW M5*14 SUS304 15
020-000090-1 CAP SCREW M6*20 SUS304 2
020-001532-1 BAIND SCREW M3*8 SUS304 10
020-005645-1 CAP SCREW CBSST4-6 6
032-000251-1 FLAT WASHER M3 SUS304 SMALL CIRCLE 28
032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 4
032-000054-1 SPRING WASHER M3 SUS304 32
032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 6
032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND 26
032-000058-1 SPRING WASHER M4 SUS304 44
032-000062-1 SPRING WASHER M5 SUS304 15
032-000024-1 FLAT WASHER M6 SUS304 POLISHED ROUND 2
032-000066-1 SPRING WASHER M6 SUS304 2
033-000003-1 NUT M3 SUS304 8
Assembly Part No: 5085-410083-11 PULLEY(X) ASSY,IDLER
5002-400080-13 PULLEY(3) 2
5010-405954-12 HOLDER,PULLEY 2
5010-405873-12 SHAFT(2) 2
5004-400021-12 HOUSING (509510045711 1
5010-405955-11 SPACER(1),BEARING 2
5010-405956-12 SPACER(2),BEARING 2
022-100356-1 BEARING 608ZZ 4
020-005664-1 CAP SCREW CBSST5-10 4
020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 2
020-000042-1 CAP SCREW M4*20 SUS304 1
032-000062-1 SPRING WASHER M5 SUS304 4
Assembly Part No: 5085-410757-11 MOTOR(X) ASSY
5002-400078-11 PULLEY(1) 1
5004-400022-11 BRACKET,MOTOR (509510045711 1
5040-000007-11 MOTOR,SERVO SGMAS-A5ABA-TE11 1
020-007185-1 SET SCREW M4*5 MF-ZNB DOUBLE POINT 2
020-000034-1 CAP SCREW M4*12 SUS304 2
032-000058-1 SPRING WASHER M4 SUS304 4
032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 5
020-000042-1 CAP SCREW M4*20 SUS304 2
020-000046-1 CAP SCREW M4*30 SUS304 1
033-000007-1 NUT M4 SUS304 1
Assembly Part No: 5085-407077-11 COVER(X) ASSY
5010-201863-11 COVER(1) 1
5010-201864-11 COVER(2) 1
5010-302543-11 COVER(3) 1
5010-307588-11 COVER(4) 1
5010-304490-11 COVER 1
5010-306600-11 COVER(6) 1
020-002601-1 BAIND SCREW M3*4 SUS304 31
020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 2
032-000251-1 FLAT WASHER M3 SUS304 SMALL CIRCLE 2
032-000054-1 SPRING WASHER M3 SUS304 2
Assembly Part No: 5085-415480-11 PULLEY(X1) ASSY,DRIVE
5002-400079-12 PULLEY(2) 1
5002-400080-13 PULLEY(3) 2
5010-405954-12 HOLDER,PULLEY 3
5010-405872-13 SHAFT(1) 1
5010-405873-12 SHAFT(2) 1
5004-400021-12 HOUSING (509510045711 1
5010-405955-11 SPACER(1),BEARING 2
5010-405956-12 SPACER(2),BEARING 1
022-100356-1 BEARING 608ZZ 4
020-005664-1 CAP SCREW CBSST5-10 4
020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 2
020-007185-1 SET SCREW M4*5 MF-ZNB DOUBLE POINT 2
032-000062-1 SPRING WASHER M5 SUS304 4
Assembly Part No: 5085-415481-11 PULLEY(X2,3) ASSY,DRIVE
5002-400079-12 PULLEY(2) 1
5002-400080-13 PULLEY(3) 2
5010-405954-12 HOLDER,PULLEY 3
5010-405872-13 SHAFT(1) 1
5010-405873-12 SHAFT(2) 1
5004-400021-12 HOUSING (509510045711 1
5010-405955-11 SPACER(1),BEARING 2
5010-405956-12 SPACER(2),BEARING 1
022-100356-1 BEARING 608ZZ 4
020-005664-1 CAP SCREW CBSST5-10 4
020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 2
020-007185-1 SET SCREW M4*5 MF-ZNB DOUBLE POINT 2
032-000062-1 SPRING WASHER M5 SUS304 4
Assembly Part No: 5086-403957-15 X AXIS(E) ASSY,PRA
5041-000299-12 CABLE ASSY 1746249-1 (PRA X #01) 1
5041-000306-12 CABLE ASSY 1746250-1 (PRA X #06) 1
5086-404162-11 CABLE,PRA X #05 1
5086-402882-12 SENSOR,PHOTO PRA X #01 450 1
5086-402883-12 SENSOR,PHOTO PRA X #02 450 1
5086-402884-12 SENSOR,PHOTO PRA X #03 445 1
5086-402885-11 SENSOR,LIGHT PRA X #01 730 1
5086-402886-11 SENSOR,DETECT PRA X #01 200 1
5041-000405-11 CABLE ASSY PRA MTR-X1 #02 1
5041-000406-11 CABLE ASSY PRA MTR-X2 #02 1
5041-000407-11 CABLE ASSY PRA MTR-X3 #02 1
5086-404248-11 CABLE,PRA ENC-X1 #03 1
5086-404249-11 CABLE,PRA ENC-X2 #03 1
5086-404250-11 CABLE,PRA ENC-X3 #03 1
5044-000077-11 PCB,I/F TOB1045(BOARD,CONN PRA X #02) 1
Assembly Part No: 5085-405946-17 THETA AXIS ASSY
5004-400020-12 THETA,BASE (509510045811 1
5010-306499-12 BRACKET(FAN) 1
5004-400016-11 HOLDER,BELT (509510045411 4
5010-404896-11 BLOCK,FITTING 2
5010-405326-11 SHUTTER(Z) 1
5010-402272-12 STOPPER 1
5010-401565-12 PLATE 2
5010-403121-12 BRACKET 1
5010-403122-12 BRACKET,SUPPORT 1
5010-408760-11 COVER 1
5010-306401-11 PLATE(1),CLAMP 2
5010-405355-11 PLATE(2),CLAMP 2
5010-306402-11 PLATE(3),CLAMP 2
5010-405356-11 PLATE(4),CLAMP 4
5010-405357-12 PLATE(5),CLAMP 2
5010-403337-11 PLATE,NUT 4
5010-403339-11 BRACKET,CLAMP(2) 2
5010-403340-11 BRACKET,CLAMP(3) 2
5002-300008-11 CABLE(1) 2
5002-300009-11 CABLE(2) 2
017-001655-1 TUBE PN-4-4*2.5 IVORY 1
026-006368-1 SPACER NCLM6-8-17.5 4
028-004861-1 FITTING,TUBE ELB4-PT1/8-TR 4
028-016917-1 FITTING,TUBE EY4-PT1/8 2
028-010939-1 FITTING,TUBE GPA6 2
020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 26
020-000007-1 CAP SCREW M3*8 SUS304 4
020-001186-1 CAP SCREW M3*35 SUS304 12
020-002945-1 CAP SCREW M4*6 SUS304 W/SPR&FLAT WASHER 16
020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 20
020-001093-1 CAP SCREW M4*14 SUS304 26
020-000042-1 CAP SCREW M4*20 SUS304 6
020-000064-1 CAP SCREW M5*20 SUS304 16
020-001164-1 CAP SCREW M6*30 SUS304 4
032-000251-1 FLAT WASHER M3 SUS304 SMALL CIRCLE 4
032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 12
032-000054-1 SPRING WASHER M3 SUS304 16
032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND 6
032-000058-1 SPRING WASHER M4 SUS304 32
032-000018-1 FLAT WASHER M5 SUS304 ROLISHED ROUND 16
032-000062-1 SPRING WASHER M5 SUS304 16
Assembly Part No: 5085-406978-11 COVER(TH) ASSY
5010-305828-12 COVER,FRONT 1
5010-305829-12 COVER,REAR 2
5010-305830-11 COVER,SIDE 2
5010-305831-11 COVER,UNDER 1
020-100825-1 BAIND SCREW M4*6 SUS304 30
Assembly Part No: 5085-407862-11 MOTOR(T) ASSY
5040-000009-11 MOTOR,SERVO SGMCS-08DDA-TE12 1
020-004197-1 CLUMPING SCREW FSU6-16 6
020-000080-1 CAP SCREW M6*10 SUS304 5
020-000090-1 CAP SCREW M6*20 SUS304 6
032-000187-1 FLAT WASHER M6 SUS304 POLISHED ROUND 6
032-000066-1 SPRING WASHER M6 SUS304 6
033-000016-1 NUT M6 SUS304 6
Assembly Part No: 5086-403958-12 THETA AXIS(E) ASSY,PRA
5041-000256-11 CABLE ASSY 1717344-6 (PRA T #11) 1
5041-000257-11 CABLE ASSY 1717344-1 (PRA T #12) 1
5041-000258-11 CABLE ASSY 1717344-3 (PRA T #13) 1
5041-000259-11 CABLE ASSY 1717344-2 (PRA T#14) 1
5041-000260-11 CABLE ASSY 1717344-5 (PRA T #15) 1
5041-000261-11 CABLE ASSY 1717344-4 (PRA T #16) 1
5041-000066-11 CABLE ASSY,FLAT WH FHV-SX(5W)76C A-A 1
5086-402872-11 SENSOR,PHOTO PRA T #01 400 1
5086-402873-11 FAN,DC PRA T #11 250 1
5086-402874-11 FAN,DC PRA T #12 250 1
5086-402875-11 FAN,DC PRA T #13 250 1
5086-402876-11 FAN,DC PRA T #14 250 1
5086-402877-11 FAN,DC PRA T #15 250 1
5086-402878-11 FAN,DC PRA T #16 250 1
5044-000017-11 PCB I/F TOB1037(CONN PRA THETA #01) 1
Assembly Part No: 5085-404901-11 FORK(300)ASSY (NOT INSTALLED OR INCLUDED)
5010-201367-13 FORK,PRA 1
5004-300007-11 BLOCK(300),PRA (509510021211 3
020-005778-1 CAP SCREW CBSST4-8 3
020-002601-1 BAIND SCREW M3*4 SUS304 6
032-000585-1 FLAT WASHER M4 1L SUS304 3
Assembly Part No: 5085-410825-14 PLATE ASSY,HEAT SHIELD
5004-400024-11 PLATE,COVER (509510045611 1
5010-406949-11 SUPPORT(X-1) 1
020-000028-1 CAP SCREW M4*6 SUS304 2
020-007602-1 TORX CAP SCREW M4*8 SUS304 2
020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 2
032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND 2
032-000058-1 SPRING WASHER M4 SUS304 2
This TEL Tokyo Electron 300mm Wafer PRA Process Block Robot is used working surplus. The Robot does not include the wafer forks or the wafer cooling plate (see photos). The physical condition is good, but there are signs of previous use and handling.
Sale Details
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Item Condition: Working, 90 Day Warranty
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Estimated Packed Shipping Dimensions: L x W x H = 32"x32"x32" @ 250 lbs; Requires Freight Shipping
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Shipping Terms: All Domestic and International shipping quotes and/or fees are subject to change due to packaging requirements, custom packing, transport rate fluctuations, and supply chain demands. We will contact you regarding any shipments that require or incur additional after purchase packing fees or rate changes.
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Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
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For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
- New, Refurbished, and Working items are sold with a 90-Day Satisfaction Guarantee
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