TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius Working
Part No: 51161-802-001
Model No: Interface Block Robotic Arm Main
IRAM
Fork is not included
Removed from a TEL Tokyo Electron Clean Track Lithius System
Made in Japan
Installed Components
NSK Robot Servo Motor Part No: M-SSB020FN502
NSK Linear Stage Slide Part No: XY-HRS025ZRS202
Parts List
Assembly Part No: 5087-403668-12, IRAM (LITHIUS IPL), X-AXIS
5080-192746-11: BASE,FORK IRAM XY-P5179 (Qty. 1)
5080-193009-11: PLATE(X),TOP XY-P5205 (Qty. 1)
5090-193008-11: COVER(X),TOP XY-P5204 (Qty. 1)
5080-193010-11: COVER(X),SIDE XY-P5206 (Qty. 2)
5080-192744-11: BELT(X),UPPER IRAM XY-P5178 (Qty. 1)
5080-193011-11: SPACER(X),BELT XY-P5207 (Qty. 1)
5080-193007-11: BASE(X),IRAM XY-P5263 (Qty. 1)
5080-193013-11: BRACKET(X),FRONT XY-P5209 (Qty. 1)
5080-192467-11: PHOTOSENSOR,IRAM X #01 XY-L3477 (Qty. 1)
5080-192468-11: PHOTOSENSOR,IRAM X #02..XY-L3476 (Qty. 1)
5080-193014-11: COVER(X),UNDER XY-P5210 (Qty. 1)
5080-192755-11: PCB,I/F IRAM X #01 XY-E3670 (Qty. 1)
5080-193012-11: BRACKET(X),IRAM XY-P5208 (Qty. 1)
5080-192466-11: PHOTOSENSOR,IRAM #01 XY-L3478 (Qty. 1)
5080-192751-12: X-AXIS,UNDER IRAM XY-HS0026-701-001 (Qty. 1)
5080-193015-11: COVER(X),BELT XY-P5211 (Qty. 1)
5080-193018-11: CASE(X),UNDER XY-P5213 (Qty. 1)
5080-192508-11: BELT(X),UNDER IRAM XY-P5002 (Qty. 1)
5080-192470-11: MOTOR,SERVO IRAM X #01 XY-M3678 (Qty. 1)
5080-193019-11: SCREW(X),IRAM XY-P5214 (Qty. 1)
5080-193017-11: BLOCK(X),SEAL XY-P5212 (Qty. 1)
5080-193020-11: COVER(X),SEAL XY-P5215 (Qty. 2)
5080-193016-11: BELT(X),SEAL XY-P5216 (Qty. 1)
5080-192749-12: X-AXIS,IRAM..XY-HS0051-804-001 (Qty. 1)
5080-192750-12: X-AXIS,UPPER IRAM..XY-HS0026-802 (Qty. 1)
Assembly Part No: 5087-403669-12, IRAM (LITHIUS IPL), T-AXIS
5080-193023-11: BLOCK(T),UPPER XY-P5218 (Qty. 1)
5080-192472-12: MOTOR,SERVO IRAM T #01 M-SSB020FN502 (Qty. 1)
5080-193022-11: BLOCK(T),IRAM XY-P5217 (Qty. 1)
5080-193021-12: BRACKET(T),IRAM M-FZ276 (Qty. 1)
5080-192466-11: PHOTOSENSOR,IRAM #01 XY-L3478 (Qty. 1)
5080-192489-11: CABLE ASSY,IRAM MTR-T #01 M-C006SB51 (Qty. 1)
This item is used working surplus. The wafer fork is not included (see photos). The physical condition is good, but there are signs of previous use and handling.
Sale Details
-
Item Condition: Used Working, 90 Day Warranty
-
Estimated Packed Shipping Dimensions: L x W x H = 38"x25"x32" @ 135 lbs.; Requires Freight Shipping
-
Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
-
For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
- Lister 0 RL
|
