TEL Tokyo Electron COT Coat Process Assembly 5087-404467-12 Lithius Working
Part No: COT Coat Process Assembly
COT Coat Process Station
Removed from a TEL Tokyo Electron Clean Track Lithius 300mm System
Parts List (approximations, some parts may vary)
Assembly Part No: 5087-404467-12 SCOPE ASSY
5004-300016-11 BATH,RRC (509510024911
5010-311958-11 COVER,BATH
5010-409215-11 PLATE (Qty. 2)
5010-311833-11 BLOCK (Qty. 2)
5010-409130-11 SUPPORT (Qty. 2)
5010-310850-11 COVER
5010-310851-11 SUPPORT
036-007976-1 SENSOR FIVER FU-2638
020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER (Qty. 6)
020-000518-1 CAP SCREW M3*4 SUS304 (Qty. 4)
020-000007-1 CAP SCREW M3*8 SUS304 (Qty. 4)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 2)
020-000009-1 CAP SCREW M3*10 SUS304 (Qty. 2)
020-000824-1 CAP SCREW M3*10 SUS304 W/SPR & FLAT WASHER (Qty. 4)
5086-405454-11 SENSOR,FIBER OPTICAL COT #06
Assembly Part No: 5085-414381-11 BATH(SLT) ASSY
010-303174-12 BATH,UPPER
5010-304645-11 BATH,UNDER
5010-303181-11 BASE
027-004755-1 O-RING KALREZ6375UP S-95 BLACK
027-004754-1 O-RING KALREZ6375UP S-100 BLACK
027-005168-1 O-RING KALREZ6375UP AS568A-116 BLACK
028-016258-1 FITTING,TUBE SS-810-1-OR
5010-406110-11 PACKING(M3) (Qty. 2)
028-008384-1 FITTING,TUBE 3.2DIA/2.2DIA*M5(IN-233-468-1 (Qty. 2)
028-008385-1 FITTING,TUBE 3.2DIA/2.2DIA*M5(IN-233-467-1 (Qty. 3)
028-001201-1 FITTING,TUBE TF-SUS
020-000012-1 CAP SCREW M3*12 SUS304 (Qty. 9)
020-100959-1 SET SCREW PT1/2 SUS TAPER PLUG 1-TYPE (Qty. 2)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 8)
020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER (Qty. 4)
5017-000009-11 TUBE,TEFLON T/#9003-PFA-NE 3.17*2.17
5017-000016-11 TUBE,TEFLON T/#9003-PFA-NE 12.7*9.52
Assembly Part No: 5087-403836-12 NOZZLE(1-5) ASSY
2910-426487-11 GASKET
5004-300018-11 TIP,NOZZLE (509510025912
5003-400002-11 STOPPER,CUT
5004-400027-11 NUT,BLOCK (509510042511 (Qty. 2)
5004-400053-11 PLATE (509510101211
5004-200006-11 CASE,LOW (509510063011
5004-200005-11 CASE,UPR (509510062911
5004-400013-11 COVER,MAGNET (509510036311
5003-300026-11 BLOCK(2),JUNCTION
5010-405489-11 TUBE SLEEVE
5010-405493-11 PACKING
5004-300019-11 JOINT (509510033211
5004-300017-11 BODY (509510033311
017-000214-1 TUBE,TEFLON NO.900-PTFE 4*3*0.5 (Qty. 3)
5017-000020-11 TUBE,POLYURETHANE U2-4-7.5*6 TRANSPARENT 20000L
017006386-1 HOSE SNACLE HOSE 9*13 L1=1700 L2=40
5037-000001-11 MAGNET ELECTROMAGNET
047-003506-1 DUCT,WIRING,FLEX TKP0250-15BR37-3L
047-003175-1 #BRACKET TKP0250-15B PKA
036-007024-1 #MAGNET TZ-0079
5024-000074-11 FLTG JOINT TC4N4-TY02
027-101580-1 O-RING NYTRYL S-18 BLACK
027-101503-1 O-RING NYTRYL S-10 BLACK (Qty. 2)
020-000579-1 CAP SCREW M3*25 SUS304 FULL SCREW (Qty. 4)
020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304 (Qty. 4)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 6)
020-000417-1 CAP SCREW M2*10 SUS304 (Qty. 2)
020-000194-1 FLAT COUNTERSUNK HEAD SCREW M4*8 SUS304 (Qty. 2)
020-000414-1 CAP SCREW M2*4 SUS304 (Qty. 2)
020-001178-1 CAP SCREW M3*30 SUS304 (Qty. 4)
020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304 (Qty. 2)
032-000054-1 SPRING WASHER M3 SUS304 (Qty. 4)
020-000020-1 CAP SCREW M3*20 SUS304 (Qty. 4)
032-000159-1 FALT WASHER M3 SUS SMALL CIRCLE (Qty. 4)
5086-404224-11 ELECTROMAGNET,COT #22
Assembly Part No: 5087-403837-12 NOZZLE(6-10) ASSY
2910-426487-11 GASKET
5004-300018-11 TIP,NOZZLE (509510025912
5003-400002-11 STOPPER,CUT
5004-400027-11 NUT,BLOCK (509510042511 (Qty. 2)
5004-400053-11 PLATE (509510101211
5004-200006-11 CASE,LOW (509510063011
5004-200005-11 CASE,UPR (509510062911
5004-400013-11 COVER,MAGNET (509510036311
5003-300026-11 BLOCK(2),JUNCTION
5010-405489-11 TUBE SLEEVE
5010-405493-11 PACKING
5004-300019-11 JOINT (509510033211
5004-300017-11 BODY (509510033311
017-000214-1 TUBE,TEFLON NO.9003-PTFE 4*3*0.5 (Qty. 3)
5017-000020-11 TUBE,POLYURETHANE U2-4-7.5*6 TRANSPARENT 20000L
017-006385-1 HOSE SNACLE HOSE 9*13 L1=1600 L2=40
5037-000001-11 MAGNET ELECTROMAGNET
047-003506-1 DUCT,WIRING,FLEX TKP0250-15BR37-3L
047-003175-1 #BRACKET TKP0250-15B PKA
036-007024-1 #MAGNET TZ-0079
5024-000074-11 FLTG JOINT TC4N4-TY02
027-101580-1 O-RING NYTRYL S-18 BLACK
027-101503-1 O-RING NYTRYL S-10 BLACK (Qty. 2)
020-000579-1 CAP SCREW M3*25 SUS304 FULL SCREW (Qty. 4)
020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304 (Qty. 4)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 6)
020-000417-1 CAP SCREW M2*10 SUS304 (Qty. 2)
020-000194-1 FLAT COUNTERSUNK HEAD SCREW M4*8 SUS304 (Qty. 2)
020-000414-1 CAP SCREW M2*4 SUS304 (Qty. 2)
020-001178-1 CAP SCREW M3*30 SUS304 (Qty. 4)
020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304 (Qty. 2)
032-000054-1 SPRING WASHER M3 SUS304 (Qty. 4)
020-000020-1 CAP SCREW M3*20 SUS304 (Qty. 4)
032-000159-1 FALT WASHER M3 SUS SMALL CIRCLE (Qty. 4)
5086-404229-11 ELECTROMAGNET,COT #27
Assembly Part No: 5085-405248-14 BLOCK ASSY,NOZZLE
5010-403579-11 BLOCK
5004-300076-11 BRACKET,BLOCK (509510071411
036-007024-1 #MAGNET TZ-0079
020-000417-1 CAP SCREW M2*10 SUS304 (Qty. 2)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 3)
020-000414-1 CAP SCREW M2*4 SUS304 (Qty. 2)
Assembly Part No: 5085-405334-12 JOINT ASSY(A),NOZZLE
5024-000031-11 #JOINT MA210-AM3-X276A
020-001234-1 CAP SCREW M2.6*8 SUS304 (Qty. 2)
020-002675-1 CAP SCREW M2.6*14 SUS304
Assembly Part No: 5085-405335-12 JOINT ASSY(B),NOZZLE
5024-000032-11 #JOINT MA210-AM3-X276B
020-001234-1 CAP SCREW M2.6*8 SUS304 (Qty. 2)
020-002675-1 CAP SCREW M2.6*14 SUS304
Assembly Part No: 5085-405336-12 JOINT ASSY(C),NOZZLE
5024-000033-11 #JOINT MA210-AM3-X276C
020-001234-1 CAP SCREW M2.6*8 SUS304 (Qty. 2)
020-002675-1 CAP SCREW M2.6*14 SUS304
Assembly Part No: 5087-401414-15 JUNCTION(S) ASSY
5010-305449-11 BLOCK,JUNCTION (Qty. 2)
5004-300033-11 BLOCK(1) (509510028911
5004-200004-11 BLOCK(2) (509510030611
5004-400043-11 PLATE(1),JUNCTION (509510060611 (Qty. 2)
044-002036-1 SUPPORT,PCB BSB-351 (Qty. 4)
028-008314-1 FITTING,TUBE C1N3/8-PT1/4ST (Qty. 2)
5028-000002-11 FITTING,TUBE TC4N6*4-PT1/4-ST
036-003553-1 RESISTANCE TEMPERATURE SENSOR Y-26959 (299880007211
027-101688-1 O-RING NYTRYL S-12 BLACK (Qty. 6)
017-005835-1 TUBE PN-1-3/8 BLUE (299510186511
020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 4)
020-000579-1 CAP SCREW M3*25 SUS304 FULL SCREW (Qty. 8)
020-000598-1 CAP SCREW M3*45 SUS304 (Qty. 4)
020-000173-1 FLAT COUNTERSUNK HEAD SCREW M3*6 SUS304 (Qty. 4)
020-001719-1 SET SCREW PT1/4 SUS TAPER PLUG 1-TYPE
1910-425012-11 PACKING(M3-PTFE) (Qty. 4)
5086-404718-11 RESISTIVE TEMP DETECTOR,#009
Assembly Part No: 5085-405425-11 PLATE ASSY,JUNCTION
5010-401427-11 PLATE(3),JUNCTION
027-101503-1 O-RING NYTRYL S-10 BLACK (Qty. 2)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 4)
This is used working surplus. The physical condition is good, but there are signs of previous use and handling.
Sale Details
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Item Condition: Used Working, 90 Day Warranty
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Estimated Packed Shipping Dimensions: L x W x H = 24"x24"x24" @ 35 lbs.
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Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
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For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
- Lister 7
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